Meaning
A series of thin metal layers deposited onto a semiconductor chip to facilitate the connection between the silicon pads and the solder bumps. This underbump metallization provides a durable interface that prevents the diffusion of solder into the silicon and ensures a strong mechanical bond. The process is a critical step in flip-chip packaging and is usually performed at the wafer level before dicing.
Adhesion Layer
Titanium or chromium is typically used as the first coating to stick firmly to the aluminum or copper pad of the chip. This initial film also seals the dielectric openings to protect the underlying circuitry from environmental moisture. A vacuum deposition process such as sputtering is used to apply the metal uniformly across the entire surface.
Diffusion Barrier
Nickel or a similar material is placed over the adhesion layer to block the migration of tin and other solder components. Without this barrier, the solder would consume the thin pad metal and lead to a brittle joint that fails under thermal stress. The thickness of this layer is carefully controlled to balance reliability with the overall height of the interconnect.
Interface Integrity
Final coatings of gold or copper are added to protect the barrier from oxidation and provide a wettable surface for the solder.